2015/16 Undergraduate Module Catalogue

ELEC3299 Introduction to Micro and Nanofabrication

20 creditsClass Size: 25

Module manager: Dr Paul Steenson
Email: d.p.steenson@leeds.ac.uk

Taught: Semesters 1 & 2 (Sep to Jun) View Timetable

Year running 2015/16

This module is not approved as a discovery module

Objectives

To provide a foundation in micro- and nano-fabrication methodologies, materials, and applications through literature review, hands-on practical work and mini project(s).

On completion of the module the students will have a good theoretical and working knowledge of the area and will be competent in the;
• Principles and techniques involved in micro- and nano-fabrication
• Inspection and Characterisation of micro- and nano-structures and materials
• Solution to relevant problems, and development and evaluation of new processing methods
• Employment of good record keeping and presentation skills for complex data
• Development of good laboratory based skills including health and safety
• Employment of good literature review and reporting techniques

Learning outcomes
Become an independent, knowledgeable and skilled micro-fabricator, with a good basic knowledge of the underlying principles and associated materials science coupled with the practical skills required to develop and evaluate a wide range of electronic and MEMS based components at the micro- and nano-scale.

Syllabus

Thin Film deposition and patterning techniques
Pattern definition – UV-photolith, E-beam, mask design, Nano-imprinting
Additive Techniques – PVD, CVD, PLD Spinning, spraying and spreading
Subtractive Techniques-Wet and Dry Etching, Laser ablation, EDM

Inspection & Characterisation
SEM/TEM, SPM, EDX, Auger, SIMS, XPS and Raman, Electrical and Electrochemical

Packaging
MEMS, Ultra-high speed, Wafer-scale, microfluidic

Teaching methods

Delivery type	Number	Length hours	Student hours
Laboratory	8	3.00	24.00
Lecture	4	2.00	8.00
Private study hours			168.00
Total Contact hours			32.00
Total hours (100hr per 10 credits)			200.00

Private study

Independent Online Learning
Private Study

Methods of assessment

Coursework

Assessment type	Notes	% of formal assessment
Essay	4 essays of 2000 words each	40.00
Project	Mini Project - 3000 words	30.00
In-course MCQ	2 in-course tests	20.00
Reflective log	Reflective log	10.00
Total percentage (Assessment Coursework)		100.00

Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated

Reading list

There is no reading list for this module

Last updated: 20/08/2014

Disclaimer

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