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2015/16 Taught Postgraduate Module Catalogue

ELEC5256M Nanofabrication and Characterisation for Molecular Scale Engineering

15 creditsClass Size: 20

Module manager: Dr D P Steenson
Email: d.p.steenson@leeds.ac.uk

Taught: Semester 1 (Sep to Jan) View Timetable

Year running 2015/16

This module is not approved as an Elective

Objectives

On completion of this module, students should be able to ...

- possess a good understanding of the methods which underpin modern nanofabrication and characterisation;
- have a familiarity of and experience with working practices and tools in clean environments;
- have developed a competence at solving problems at the nanoscale and the ability to use the appropriate fabrication technique;
- have developed good clean room and laboratory working methods with appropriate experimental record keeping;
- understand the technologies used in industry and research.

Learning outcomes
- To provide a knowledge and understanding of advanced nanofabrication techniques and develop competence with a range of clean room processing and characterisation techniques.
- All students will attend three intensive practicals where they will be trained in a number of experimental and/or modelling techniques


Syllabus

- Thin film disposition including chemical vapour deposition (CVD) and molecular beam epitaxy (MBE).
- Lithography including photolithography, electron beam lithography. Contact print methods, UV lithography and focused ion beam methods.
- Clean room techniques and working practices.
- Electrodeposition, etching, microporous alumina, electropolymers, electrocrystallisation.
- Electron microscopy and related materials analysis techniques
- Surface analysis; scanning proble microscopy

Teaching methods

Delivery typeNumberLength hoursStudent hours
Lecture52.0010.00
Practical233.0069.00
Private study hours71.00
Total Contact hours79.00
Total hours (100hr per 10 credits)150.00

Methods of assessment


Coursework
Assessment typeNotes% of formal assessment
PracticalClean room fabrication report40.00
PracticalElectron microscopy report30.00
PracticalAtomic force microscopy report30.00
Total percentage (Assessment Coursework)100.00

Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated

Reading list

The reading list is available from the Library website

Last updated: 26/07/2013

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