2015/16 Taught Postgraduate Module Catalogue
ELEC5500M Micro- and Nano-Electromechanical Systems
15 creditsClass Size: 100
Module manager: Dr. Chris Wood
Email: c.d.wood@leeds.ac.uk
Taught: Semester 2 (Jan to Jun) View Timetable
Year running 2015/16
This module is not approved as an Elective
Objectives
The aim of the module is to provide students with a working knowledge of the principles of operation, physical structures, methods of fabrication, properties and market relevance of a range of Micro- and Nano-Electromechanical systems.Microfabrication: micromaching processes, anisotropic etching, selective etching, reactive ion etching, focused ion beam systems.
Syllabus
- Microsensors: thermal sensors, radiation sensors, magnetic sensors, chemical sensors, mechanical sensors, 'lab on a chip'.
- Microactuators: mechanical properties of beams and cantilevers, RF switches, micromotors, micropumps, opto-MEMS.
- Extension to the Nanoscale: molecular self-assembly, biosensors, ion channels and transport, molecular motors.
- Microcomponent assembly and packing: microassembly, fluidic self-assembly, wafer bonding.
Teaching methods
| Delivery type | Number | Length hours | Student hours |
| Lecture | 10 | 2.00 | 20.00 |
| Private study hours | 130.00 | ||
| Total Contact hours | 20.00 | ||
| Total hours (100hr per 10 credits) | 150.00 | ||
Private study
Background reading, reading lecture notes and exam revision.Methods of assessment
Coursework
| Assessment type | Notes | % of formal assessment |
| Essay | 2,000 words | 50.00 |
| Total percentage (Assessment Coursework) | 50.00 | |
Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated
Exams
| Exam type | Exam duration | % of formal assessment |
| Standard exam (closed essays, MCQs etc) | 3 hr | 50.00 |
| Total percentage (Assessment Exams) | 50.00 | |
Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated
Reading list
The reading list is available from the Library websiteLast updated: 17/08/2015
Browse Other Catalogues
- Undergraduate module catalogue
- Taught Postgraduate module catalogue
- Undergraduate programme catalogue
- Taught Postgraduate programme catalogue
Errors, omissions, failed links etc should be notified to the Catalogue Team.PROD