2016/17 Taught Postgraduate Module Catalogue
ELEC5200M Next Generation Silicon Technologies
15 creditsClass Size: 40
Module manager: Dr R.W. Kelsall
Email: r.w.kelsall@leeds.ac.uk
Taught: Semester 2 (Jan to Jun) View Timetable
Year running 2016/17
This module is not approved as an Elective
Objectives
On completion of this module, students should be able to:- demonstrate an understanding of the key processes involved in silicon integrated circuit fabrication;
- demonstrate the physical, materials and engineering issues which must be addressed to ensure future progress in this technology;
- demonstrate the manufacturing solutions proposed or under development in each case.
Syllabus
- Silicon microfabrication techniques: crystal growth, oxidation, lithography, doping, metallisation and interconnects, wire bonding.
- Design rules; scaling rules; yield modelling.
- Revision of MOSFET operation and connection with processing requirements.
- Moore's Law: trends in silicon integrated circuit performance and manufacturing over 5 decades.
- Next generation issues: overview of the International Technology Roadmap for Semiconductors; advanced and alternative lithography methods; self-heating, heat dissipation and thermal management; issues for continued scaling of the device active region, including short channel effects, new materials and new geometries; gate stack design; and advancements in metallisation and interconnects.
Teaching methods
| Delivery type | Number | Length hours | Student hours |
| Lecture | 6 | 2.00 | 12.00 |
| Seminar | 5 | 2.00 | 10.00 |
| Private study hours | 128.00 | ||
| Total Contact hours | 22.00 | ||
| Total hours (100hr per 10 credits) | 150.00 | ||
Private study
- Backround reading and preparation for seminars.- Preparation for the essay and presentation.
- Revision for exam.
Opportunities for Formative Feedback
Student progress will be monitored during the 5 x 2 hour seminars.Methods of assessment
Coursework
| Assessment type | Notes | % of formal assessment |
| Essay | . | 25.00 |
| Presentation | . | 25.00 |
| Total percentage (Assessment Coursework) | 50.00 | |
Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated
Exams
| Exam type | Exam duration | % of formal assessment |
| Standard exam (closed essays, MCQs etc) | 3 hr | 50.00 |
| Total percentage (Assessment Exams) | 50.00 | |
Normally resits will be assessed by the same methodology as the first attempt, unless otherwise stated
Reading list
The reading list is available from the Library websiteLast updated: 17/08/2015
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- Undergraduate module catalogue
- Taught Postgraduate module catalogue
- Undergraduate programme catalogue
- Taught Postgraduate programme catalogue
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