2017/18 Taught Postgraduate Module Catalogue
ELEC5500M Micro- and Nano-Electromechanical Systems
15 creditsClass Size: 100
Module manager: Dr. Chris Wood
Email: c.d.wood@leeds.ac.uk
Taught: Semester 2 (Jan to Jun) View Timetable
Year running 2017/18
This module is not approved as an Elective
Objectives
The aim of the module is to provide students with a working knowledge of the principles of operation, physical structures, methods of fabrication, properties and market relevance of a range of Micro- and Nano-Electromechanical systems.Syllabus
- Microfabrication: Etching techniques including: anisotropic etching, crystallographic etching, selective etching, reactive ion etching, ion-beam etching, sputtering. Deposition techniques including: Evaporation, sputtering, CVD (including LPCVD, APCVD, PECVD), thermal oxidation, ALD.
- Microsensors: thermal sensors, capacitive sensors, bio-sensors, chemical sensors, mechanical sensors, 'lab on a chip'.
- Microactuators: mechanical properties of beams and cantilevers, RF switches, RF resonators, micromirrors, varactors.
- Extension to the Nanoscale: Molecular self-assembly, biosensors, ion channels and transport, molecular motors.
- Microcomponent assembly and packing: microassembly, fluidic self-assembly, wafer bonding, flip-chip bonding.
Teaching methods
| Delivery type | Number | Length hours | Student hours |
| Lecture | 12 | 2.00 | 24.00 |
| Private study hours | 126.00 | ||
| Total Contact hours | 24.00 | ||
| Total hours (100hr per 10 credits) | 150.00 | ||
Private study
Background reading, reading lecture notes, examples and exam revision.Methods of assessment
Coursework
| Assessment type | Notes | % of formal assessment |
| Essay | Outline essay proposal, 200 words | 5.00 |
| Essay | 2500 words | 45.00 |
| Total percentage (Assessment Coursework) | 50.00 | |
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Exams
| Exam type | Exam duration | % of formal assessment |
| Standard exam (closed essays, MCQs etc) | 3 hr | 50.00 |
| Total percentage (Assessment Exams) | 50.00 | |
Re-sits for ELEC modules are subject to the rules in the School’s Code of Practice on Assessment. Students should be aware that, for some modules, a re-sit may only be conducted on an internal basis (with tuition) in the next academic session.
Reading list
There is no reading list for this moduleLast updated: 26/04/2017
Browse Other Catalogues
- Undergraduate module catalogue
- Taught Postgraduate module catalogue
- Undergraduate programme catalogue
- Taught Postgraduate programme catalogue
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